![]() ![]() ![]() 239000004020 conductor Substances 0.000 claims description 3. ![]() 230000002093 peripheral Effects 0.000 claims description 5.239000000919 ceramic Substances 0.000 claims description 8.229910052751 metal Inorganic materials 0.000 claims description 10.230000000875 corresponding Effects 0.000 claims abstract description 7.238000001514 detection method Methods 0.000 claims abstract description 18.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by NEC Tokin Corp, NEC Tokin Ceramics Corp filed Critical NEC Tokin Corp Priority to JP2002042571A priority Critical patent/JP2003240559A/en Publication of JP2003240559A publication Critical patent/JP2003240559A/en Status Pending legal-status Critical Current Links Original Assignee NEC Tokin Corp NEC Tokin Ceramics Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Inventor Nagayuki Ono 長幸 小野 Hiromichi Kobayashi 広道 小林 Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Pending Application number JP2002042571A Other languages Japanese ( ja) Google Patents Piezoelectric vibration gyro Google Patents JP2003240559A - Piezoelectric vibration gyro JP2003240559A - Piezoelectric vibration gyro ![]()
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